THERMOCHEMICAL LASER ETCHING Micromachining of metals. Application areas:
		Thin film technology: Selective precision structuring of film systems Micromechanics: Precision cutting of foils Micromolding technology: Micromachining of defined structure shape
	Properties: (Data depend on the material and the application)
		Materials: Titanium, nickel, chromium, stainless steel, shape memory alloys Structure dimensions: resolution > 1 bis 10 µm aspect ratio < 10 shape fidelity < 0,5 bis 5 µm Surface quality: Ra > 0,2 bis 1 µm Rz > 0,6 bis 3 µm
	LASER ABLATION Precision machining of metals, ceramics and compound materials. Application areas:
		Micro mechanics: fine drilling deep drilling micro dies fine cutting Micro welding: Micro spot welding of electronic contacts
	Properties: (statements depend on materials and applications)
		Structure dimensions: resolution < 10 µm aspect ratio > 10 taper > 2° accuracy < 2 µm Surface quality: Ra > 1µm Rz > 5 µm
	Additional Services:
		feasibility studies prototyping technology advisory service