| Laser etching of metals can be achieved in different solutions of acids or bases using cw-lasers in the visible or near infrared region. Thereby, the interaction of a focussed laser beam with the material surface being covered with a liquid etchant activates an enhanced thermochemical etching reaction leading to a material removal from the irradiated area. The processing results in a residue-free material removal from the laser irradiated area and a low thermal influence on the workpiece. Applications of thermochemical laser etching are in the field of sensor technology, micromechanics and micromolding technology. This includes the microstructuring of thin film systems (Fig. 1), cutting of foils (Fig. 2) or the generation of structures with defined shape in bulk material (Fig. 3).
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| Fig. 1: Sensor system based on Cr + DLC |
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