Micro analysis is an important topic of the research and development work of the Laser-Microtechnology department. Main aim of the activities is optimisation of the developed technologies and of the physical-technical and functional properties of the synthesized materials. For this purpose, modern and in respect to the special tasks optimised or accordingly modified methods and measuring techniques are used, ranging from the Scanning Electron Microscopy (SEM) over the Energy Dispersive X-Ray Spectroscopy (EDX) and the Auger Electron Spectroscopy (AES) to the new Scanning Probe Methods as the Atomic Force Microscopy (AFM), Micro Raman Spectroscopy (MRS) and the Scanning Near-Field Optical Microscopy (SNOM).

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